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Hot-C + -Ion Implantation Optimization for Forming Nano-SiC Region at Surface (100)SOI Substrate
Hot-C + -Ion Implantation Optimization for Forming Nano-SiC Region at Surface (100)SOI Substrate
2017
tomohisa Mizuno
Yusuke Omata
Shinji Nakada
Takashi Aoki
T Sasaki
Keywords:
Ion implantation
Substrate (chemistry)
Silicon on insulator
Optoelectronics
Nano-
Materials science
Photonics
soi substrate
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