Behaviour of Erbium implanted in InP

Erbium impurities were implanted in indium phosphide. The 2 K, 77 K and 300 K photoluminescence spectra show, after annealing at high temperature, the main erbium emission centered at 1.536μm. The variation of this Er-peak luminescence is studied as a function of the implanted dose, the annealing temperature and the annealing duration.