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Investigation of the heating method for substrates to improve the quality of h-BN thin films grown by CVD
Investigation of the heating method for substrates to improve the quality of h-BN thin films grown by CVD
2019
Tomoyasu Nakama
Takumi Kawarazaki
Kazuki Matsusita
Hiroko Kominami
Kazuhiko Hara
Keywords:
Chemical engineering
Thin film
Chemical vapor deposition
Materials science
hexagonal boron nitride
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