Impaired neuronal migration and endochondral ossification in Pex7 knockout mice: a model for rhizomelic chondrodysplasia punctata
2003
A series of evaluation steps is described for the planarization of a semiconductor substrate, such as a semiconductor wafer, using a linear track polisher having a continuous polishing surface. In the series of evaluation steps, there is determined a first pressure and a first continuous polishing surface speed at which an optimum material removal rate can be achieved and wherein the continuous polishing surface does not accumulate glaze as is possible when planarizing doped oxides such as PSG and BPSG.
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