Apparatus for controlling electric static chuck and stage of bonding machine and method for controlling the electric static chuck

PURPOSE: A stage of an adhesion apparatus, an electro static chuck(ESC) control apparatus and a control method thereof are provided to simplify the entire size of the apparatus, thereby capable of implementing the apparatus having an optimum layout. CONSTITUTION: The adhesion apparatus comprises a base frame(100), an upper chamber unit(210), a lower chamber unit(220), a chamber moving device(310,320,330,340,350), an upper stage(230), a lower stage(240), a sealing device, a pair of low vacuum chamber units(410,420), an alignment device(510,520,530,540), a vacuum pumping device(610,630), a support device(710,720,731,732,733), and a light curing device(800). Each stage(230,240) comprises fixing plates(231,241) fixed to each chamber unit(210,220), adhesion plates(232,242) fixed each substrate, and a plurality of fixing blocks(233,243) mounted between the adhesion plates(232,242). Each adhesion plate(232,242) is formed by polyimide and comprised of an ESC for fixing each substrate by an electrostatic force.