WO3-Based Sensor Based on Hall Effect for NO2 Detection: Designed and Investigation

Novel tungsten oxide sensors were fabricated based on Hall Effect and their NO2 gas sensing properties were examined. Tungsten trioxide was grown by vapor evaporation of metal tungsten filament in an oxygen atmosphere. A WO3 thick film was deposited on the four Au electrode to be a WO3 sensor. The sensor was tested between magnetic field in a plastic test chamber. The gas sensing experiment revealed that at the NO2 concentration of 40 ppm, a sensitivity of 3.27, a response time of 36 s, and a recovery time of 45 s were observed at room-temperature. The effect of WO3 based on Hall Effect on the sensing characteristic is discussed.