Three dimensional design of silver nanoparticle assemblies embedded in dielectrics for Raman spectroscopy enhancement and dark-field imaging.

A strategy to design and fabricate hybrid metallic-dielectric substrates for optical spectroscopy and imaging is proposed. Different architectures consisting of three-dimensional patterns of metallic nanoparticles embedded in dielectric layers are conceived to simultaneously exploit the optical interference phenomenon in stratified media and localized surface plasmon resonances on metal nanoparticles. These structures are based on a simultaneous control of opto-electronic properties at three scales (3S) (∼2/20/200 nm) and along three directions (3D). By ultralow energy ion implantation through a microfabricated stencil we precisely control the size, density, and location of silver nanoparticles embedded in silica/silicon thin films. Elastic (Rayleigh) and inelastic (Raman) scattering imaging assisted by simulations were used to analyze the optical response of these “3S–3D” patterned layers. The reflectance contrast is strongly enhanced when resonance conditions between the stationary electromagnetic field...