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Study of annealing condition for improving quality of Si/Hf 0.5 Zr 0.5 O 2 interface
Study of annealing condition for improving quality of Si/Hf 0.5 Zr 0.5 O 2 interface
2019
Kento Tahara
Kato Kimihiko
Toprasertpong Kasidit
Takenaka Mitsuru
Takagi Shinichi
Keywords:
Chemical engineering
Annealing (metallurgy)
Materials science
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