Electrical and Polarization Properties of Nano-Sized ZrO2 on Polycrystalline Silicon

The transient conductivity and polarization of nano-sized ZrO2 thin films were investigated. RF magnetron sputtering was used for the deposition of the films with different thicknesses on poly-Si. The layers were annealed at 600 and 850oC in oxygen ambient. Capacitors fabricated with top Al contacts were studied by current-voltage and hysteresis loop measurements. The dependence of the polarization on thickness and annealing temperature was evaluated.