Capacitive phase selection for dielectric micro-bolometer

One promising method of measuring the temperature change of microbolometers in sensor layers for infrared radiator at ambient temperature represents the measurement of the capacitance variation of ferroelectric material, but that could not be solved satisfactorily hitherto. The present invention is based on the discovery that the previously disturbing fluctuations can be eliminated in the resulting measurement signal by the use of fine grained sintered materials and of high frequency. The resulting change in capacitance by a change in temperature is obtained by an integrable with CMOS technology device for phase comparison, wherein an electronic accuracy can be achieved, which is below the thermal noise for micro-structured pixel cells. Based on the increased sensitivity with improved time resolution technical solutions for the manufacture are marked with established manufacturing technologies. result from cost-effective production and increased resolution except the military field applications in the civil security area of ​​automatic control in the vehicle sector, control in production engineering, medical diagnosis and even for personal use if there is insufficient lighting in the evening or, weather permitting. At slightly reduced resolution and correspondingly lower weight and cost, applications in the hobby area are to be expected (eg. As equipping Hobby drones).