Old Web
English
Sign In
Acemap
>
Paper
>
Preparation and Characterization of All-ALD-Grown Films with High Moisture Permeation Barrier
Preparation and Characterization of All-ALD-Grown Films with High Moisture Permeation Barrier
2015
Hideaki Zama
Keywords:
Atomic layer deposition
Moisture
Permeation
Inorganic chemistry
Materials science
Chemical engineering
moisture permeation
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]