Development of the vibration analysis and suppression technology for laser galvanometers based on inertial sensing technology

This paper presents an inertial-sensing-based vibration analysis and suppression system for laser galvanometers. The functions of this system are to measure the vibrations during rotation motions of galvanometers and to design a comb filter for restraining the vibrations of the galvanometers effectively. The proposed system is composed of an intelligent motion control platform, a servo driver circuit, a galvanometer driver module, a galvanometer, and a MEMS piezoelectric accelerometer. The proposed system can measure the vibration signals generated by the galvanometer using the piezoelectric accelerometer and utilize the fast Fourier transformation (FFT) to analyze the vibration frequencies. Subsequently, a digital comb filter is designed to restrain the vibrations of the galvanometer based on the obtained vibration frequencies. Finally, the experimental results have successfully validated that the proposed inertial-sensingbased vibration analysis and suppression system, and the designed comb filter can measure, analyze, and restrain the vibrations of the galvanometer effectively and further improve the accuracy and stability of the laser galvanometer scanning system.