Impact of process variability of active ring resonators in a 300mm silicon photonic platform

Patrick Le Maitre,Jean-François Carpentier,Charles Baudot,N. Vulliet,Aurélie Souhaité,Jean-Baptiste Quelene,Thomas Ferrotti,Frederic Bouf

Impact of process variability of active ring resonators in a 300mm silicon photonic platform

2015

Patrick Le Maitre
Jean-François Carpentier
Charles Baudot
N. Vulliet
Aurélie Souhaité
Jean-Baptiste Quelene
Thomas Ferrotti
Frederic Bouf

We study the process variability impact of silicon ring modulators on resonance wavelength, which is a key parameter to design WDM communication systems based on those devices.

Keywords:

Engineering
Waveguide (optics)
Photonic integrated circuit
Silicon photonics
Electronic engineering
Optics
Photonics
Optical performance monitoring
Resonance
Resonator
Hybrid silicon laser
Optoelectronics
Silicon

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