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Building a ‘Design-to-Analysis’ Interface for Summit™-Based Microsystem Development
Building a ‘Design-to-Analysis’ Interface for Summit™-Based Microsystem Development
2001
C. Channy Wong
Craig R. Jorgensen
Victor R. Yarberry
Pauline Ho
Roger P. Pawlowski
James Freymiller
Darryl J. Melander
Keywords:
Engineering physics
Surface micromachining
Microelectromechanical systems
Summit
Microsystem
Interface (Java)
Materials science
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