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Inverted Cylindrical Magnetron Sputtering of Optical Coatings
Inverted Cylindrical Magnetron Sputtering of Optical Coatings
2015
Mark M. Romach
G. Sherer
J. Eichenberger
John Lanzafame
David A. Glocker
M. Jaszcar
B. Rayner
Keywords:
High-power impulse magnetron sputtering
Sputter deposition
Optical coating
Materials science
Composite material
Cylinder
Optoelectronics
Correction
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