A New Fabrication Technique of a DNA Electrophoresischip by Silicon Micromachining Technology

J. Tsuda,Y. Tada,Gen Hashiguchi,Ken Hirano,Noritada Kaji,Yoshinobu Baba

A New Fabrication Technique of a DNA Electrophoresischip by Silicon Micromachining Technology

2002

J. Tsuda
Y. Tada
Gen Hashiguchi
Ken Hirano
Noritada Kaji
Yoshinobu Baba

We have developed a new fabrication technique of DNA electrophoresis chip having minute pillar array in the electrophoretic channel by silicon micromachining technology.

Keywords:

Pillar
Gel electrophoresis of nucleic acids
Analytical chemistry
A-DNA
Bulk micromachining
Surface micromachining
Hybrid silicon laser
Materials science
Silicon
Fabrication
Electrophoresis
Optoelectronics
Chip

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