High Performance 45-nm SOI Technology with Enhanced Strain, Porous Low-k BEOL, and Immersion Lithography

We present a 45-nm SOI CMOS technology that features: i) aggressive ground-rule (GR) scaling enabled by 1.2NA/193nm immersion lithography, ii) high-performance FET response enabled by the integration of multiple advanced strain and activation techniques, iii) a functional SRAM with cell size of 0.37mum 2 , and iv) a porous low-k (k=2.4) dielectric for minimized back-end wiring delay. The list of FET-specific performance elements includes enhanced dual-stress liner (DSL), advanced eSiGe, stress memorization (SMT), and advanced anneal (AA). The resulting PFET/NFET Idsat values, at Vdd of 1.0V and 45nm GR gate pitch, are 840muA/mum and 1240muA/mum respectively. The global wiring delay achieved with k=2.4 reflects a 20% reduction compared to k=3.0