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Optical properties and metrology of the high-k/Si interface
Optical properties and metrology of the high-k/Si interface
2005
Stefan Zollner
Yong Liang
D. Theodore
Z. Yu
Dina Triyoso
Jay Curless
Clarence J. Tracy
Keywords:
Metrology
High-κ dielectric
Dynamic range
X-ray reflectivity
Materials science
Optics
Optoelectronics
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