Valve, the fluid control device
2015
Fluid control device (100) comprises a piezoelectric pump (10) and the inhaler (9) and a valve (101). The piezoelectric pump (10) includes a discharge hole of the suction hole (53) and gas in the gas (24). Inhaler (9) includes a container (90) and inlet (91) and the connecting hole (92). Valve (101) has a first ventilation hole (111) and the second vent hole (112) Third vent (113) and the first valve housing and (191) second valve housing (192) a diaphragm (120) with the door. The first vent valve (101) (111) is connected to the connecting hole (92) of the inhaler (9). The second vent valve (101) (112) is connected to the suction hole of the piezoelectric pump (10) (53). Third vent valve (101) (113) is open to the atmosphere. Diaphragm (120) is held between the first valve housing (191) and a second valve housing (192), constituting the first region and the second region.
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