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Slope measuring metrology for precision free-form surfaces
Slope measuring metrology for precision free-form surfaces
2011
Robert E. Parks
Peng Su
Tom L. Zobrist
Tianquan Su
Won Hyun Park
Margaret Z. Dominguez
Lirong Wang
G. Zhu
Guillaume P. Butel
S. H. Lu
Yuhao Wang
Ping Zhou
James H. Burge
Keywords:
Metrology
Analytical chemistry
Materials science
Optics
free form
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