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Evaluation of the 3D Compositional Fluctuation Effect on Line-Edge-Roughness | NIST
Evaluation of the 3D Compositional Fluctuation Effect on Line-Edge-Roughness | NIST
2007
Shuhui Kang
Wen Li Wu
Bryan D. Vogt
Vivek M. Prabhu
Eric K. Lin
Karen Turnquest
Keywords:
Optics
Thin film
NIST
Surface finish
Physics
Photoresist
line edge roughness
Correction
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