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Investigating High Opacity and Increased Activation Energy in the Multi-Trigger Resist
Investigating High Opacity and Increased Activation Energy in the Multi-Trigger Resist
2021
Carmen Popescu
G. OCallaghan
Alexandra McClelland
John Roth
T. Łada
Takanori Kudo
R. Dammel
M. Moinpour
Yi Cao
Alex P. G. Robinson
Keywords:
Optoelectronics
Materials science
Opacity
Activation energy
Resist
Correction
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