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Characterization of Planarized Low-k Dielectrics by Atomic Force Microscopy
Characterization of Planarized Low-k Dielectrics by Atomic Force Microscopy
2003
Elizabeth Covington
Eric Botello
Wayne Stalsworth
James McDonald
Daniel White
Christine Williams
Michael Arthur
Deborah C. Koeck
David Donnelly
Heather C. Galloway
Keywords:
Atomic force microscopy
Dielectric
Optoelectronics
Materials science
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