Growth of Carbon Nanotube Layers in a Thermal CVD Reactor on Substrates Prepared by Catalyst Spray Deposition

One major problem for implementation of CNTs in new materials is their production reproducibility. In this work the catalyst distribution on the substrate and the growth of aligned CNTs were investigated. To achieve fine grained catalyst distribution solutions containing Fe, Co and Ni were sprayed by an air-brush on glass substrates. The optimal spray conditions were investigated. CNT deposition followed in an air pressure flow reactor. The gas phase consists of Argon, Hydrogen, Ethylene as carbon source and water in concentrations of 75 to 1500 ppm referring to the carbon concentration. The CNT-layers were investigated by SEM and TEM.