Study on Dislocation Annihilation Mechanism of the High-Quality GaN Grown on Sputtered AlN/PSS and Its Application in Green Light-Emitting Diodes

GaN was grown on the sputtered AlN/patterned sapphire substrate under two growth modes by metal–organic chemical vapor deposition, which was named as “rising tide” and “tsunami” growth modes, respectively, due to different characteristics of the GaN growth process. High-quality GaN epilayer was obtained under “tsunami” growth mode, and the full-width at half-maximums of GaN (002)/(102) high-resolution X-ray diffraction rocking curves were 58/90 arcsec. The green InGaN/GaN light-emitting diodes fabricated on GaN under “tsunami” growth mode exhibited both higher light output power and external quantum efficiency. By monitoring the GaN films at different growth stages using the scanning electron microscope and the transmission electron microscope as well as cathodoluminescence, the dislocation annihilation mechanisms were researched. Under “tsunami” growth mode, GaN grew into the shape of a truncated pyramid that promoted dislocations originated from flat area bend toward the inclined planes, and it was noteworthy that the propagation of dislocations in grains on the conical surface was inhibited. While under “rising tide” growth mode, the dislocations on the conical surface had chances to extend.