Spectral domain interferometer-based refractive index and thickness synchronous measurement method and system thereof

The invention discloses a spectral domain interferometer-based refractive index and thickness synchronous measurement method and a system thereof. The system is a spectral domain low-coherence interferometry-based detection system. The method comprises the following steps: a detected sample is inserted to a sample arm light path to make parts of light beams penetrate through the detected sample and make the other parts of the light beams be unable to go through the detected sample, and all the lights irradiate a planar mirror and are reflected to the system; and the lights returned from the front surface and the back surface of the detected sample form a group of interference signals, light beams reflected from the planar mirror in the sample arm, penetrating through the detected sample and being unable to go through the sample form another group of interference signals, the spectra of the two groups of the interference signals are detected through a spectrometer, and data acquisition and processing are carried out through a computer to simultaneously obtain the thickness and refractive index information of the detected sample. The measurement system has the advantages of no need of movement of any elements in the system, stable structure, and simultaneous obtaining of the refractive index and thickness information of the detected sample only through one-time measurement.