Microstructure of soft magnetic FeCoZrO films with high saturation magnetization

In this paper, we present our detailed work of the microstructural characterization, using transmission electron microscopy (TEM), high resolution TEM and small angle X-ray scattering (SAXS). The effect of oxygen on the microstructure and the relationship between the microstructure and magnetic properties are clarified. The effect of annealing on the magnetic properties and microstructure has also been studied.