Obtaining of composite metal-carbon nanoparticles by magnetron sputtering

Abstract Nanocomposites represent a new generation of new materials that are formed by mixing one or more dissimilar materials at the nanoscale to control and develop new and improved structures, as well as properties. In this work, metal-carbon nanoparticles were synthesized by magnetron sputtering at different direct current values. During the experimental work, the working gas pressure varied from 0.5 to 1.5 torr, and the gas discharge current from 0.2 to 0.6 A. The dependence of the size of the synthesized nanoparticles on the gas pressure in the volume was also experimentally determined. It was found that with a change in gas pressure and gas flow, the size of the nanoparticles and their concentration changes. An SEM image and the chemical composition of the samples were obtained, and a particle size distribution was constructed. The SEM image shows that the sizes of carbon-copper nanoparticles obtained at various parameters of the magnetron discharge vary in the range of 36–250 nm.