A high-sensitivity and wide dynamic range acoustic sensor using multiple mzis micro-opto-mechanical technology

Micro-Opto-Mechanical Pressure Sensor (MOMPS) has been demonstrated the capability of measuring acoustic waves with improved sensitivity and noise resistance compared to other methods due to its insensitivity to electromagnetic interferences and radiation hardness. It has been achieved using Mach-Zendher Interferometer (MZI) systems. However, the detection sensitivity of this standard MZI MOMPS can only be improved at the cost of a reduced dynamic range which depends on the number of loops in the MZI. To address this issue, we proposed a high sensitivity and wide dynamics range acoustic sensor by combining two different MZIs in a single wavelength system that relies on a simple readout detector.