AN APPLICATION OF PLASMA-POLYMERIZED YbPc $_2$ FILM: HUMIDITY SENSOR
1996
Humidity sensing cheracterisrics of vacuum deposited plasma poly merized films were evaluated. In both films, humidity caused an increase of pro-ton conduction. Polymerised film shows a threshold fo humidity increase and its sensitivity diminishes more than of relative humidity. Furthermore, for the polymerized film, two min. of resssponse time and 1 min. of recovery time are also obtained. The sensitivity between 10% and 85% of relative hum-idities is found to be one hundred higher than that of the vacuum deposited film.
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