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Epitaxial growth of BaTiO 3 thin films by plasma-enhanced metalorganic chemical vapor deposition
Epitaxial growth of BaTiO 3 thin films by plasma-enhanced metalorganic chemical vapor deposition
1992
C. S. Chern
J Zhao
L Luo
P. Lu
Y Q Li
P. Norris
Bernard H. Kear
Frederic Cosandey
Carl J. Maggiore
B. Gallois
B. J. Wilkens
Keywords:
Plasma
Chemical vapor deposition
Optoelectronics
Thin film
Analytical chemistry
Physics
Epitaxy
Correction
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