Facet Formation of AlGaN/AlN-based Multiple Quantum Wells by Laser Scribing

We proposed a laser-assisted method to obtain smooth Fabry-Perot cavity facet of AlGaN-based UV laser structure grown on c-plane sapphire. We demonstrated that laser scribing parameters has significant influence on the morphology of the cleavage plane. Smoothness and uniformity of the facet was improved by choosing appropriate cleaving direction, distance and depth. Therefore, laser scribing is an effective and controllable process to fabricate facets of AlGaN-based laser.