sensor device has the solid electrolyte micromechanics and process for its manufacturing

Sensor arrangement micromechanical solid electrolyte comprising a micromechanical carrier (1) having a front side (VS) and a rear side (RS), a first porous electrode (E1) and a second porous electrode (E2), and a solid electrolyte ( 5) between the first porous electrode (E1) and the second porous electrode (E2).