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The effects of resist strip processing on a porous low k dielectric oxide
The effects of resist strip processing on a porous low k dielectric oxide
2018
H. Donohue
K. Buchanan
Rafal E. Dunin-Borkowski
S.B. Newcomb
Keywords:
Oxide
Low-k dielectric
Porosity
Resist
Composite material
Materials science
Correction
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