Impact of using filtration on global and local uniformity of spin on glue materials
2011
Because of their high viscosity, spin on glue materials used for permanent and temporary bonding applications are
usually difficult to dispense and filter at the point of use and achieve high quality, uniform, bubble-free coatings. In this
paper, we will focus on the use of the IntelliGen® HV dispense system and its optimisation to improve the temporary
bonding material coating uniformity. The system was first utilized without filtration to understand the effect of bubble
introduction to the coating. The second phase of the project studied the impact of filtration on the quality of the coating
when bubbles were introduced. Coating uniformity data were collected by a Senduro reflectometer and bubble
defectivity studies were performed using the NandaTech® SPARK inspection tool.
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