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Drive-in diffusion studies on antimony and gallium implanted into silicon
Drive-in diffusion studies on antimony and gallium implanted into silicon
1974
J. Gyulai
L. Csepregi
Tim R. Nagy
J. W. Mayer
H. Müller
Keywords:
Radiation effect
Ion implantation
Antimony
Radiochemistry
Gallium
Silicon
Materials science
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