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A Novel MEMS Pressure Sensor Integrated with an Optical Fiber
A Novel MEMS Pressure Sensor Integrated with an Optical Fiber
2001
Don C. Abeysinghe
Samhita Dasgupta
Joseph T. Boyd
Howard E. Jackson
Keywords:
Fabry–Pérot interferometer
Fiber optic splitter
Fiber optic sensor
Pressure sensor
Microelectromechanical systems
Optical fiber
Optics
Materials science
Polarization-maintaining optical fiber
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