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Numerical simulation of atomic layer deposition for thin deposit formation in mesoporous substrate
Numerical simulation of atomic layer deposition for thin deposit formation in mesoporous substrate
2021
Liwei Zhuang
Peter Corkery
Dennis T Lee
Seungjoon Lee
Mahdi Kooshkbaghi
Zhen Liang Xu
Gance Dai
Ioannis G. Kevrekidis
Michael Tsapatsis
Keywords:
Chemical engineering
Materials science
Atomic layer deposition
Mesoporous material
Substrate (chemistry)
Membrane
Computer simulation
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