Ti+C+N FILM PREPARATION AND ITS PROPERTIES BY LOW ENERGY CO-DEPOSITION ON STEEL

The Ti+C+N film was co-deposited on H13 steel by Filtered Vacuum Arc PlasmaDeposition (FVAPD) operated with a modified cathode. The co-deposited layer waseffective for the improvement of surface hardness and corrosion resistance. The nano-hardness value of the co-deposited film is 1.3 times more than that of undepositedsample. The corrosion behavior measurement shows that the corrosion resistance foracid corrosion and pitting corrosion was improved greatly. It is owing to the formationof the new ternary ceramic phase TiCo.7 No.3 in the co-deposited layer. The mechanismof property improvement is discussed.