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Effects of the sequential implantation of Mg and N ions into GaN for p-type doping
Effects of the sequential implantation of Mg and N ions into GaN for p-type doping
2021
Hideki Sakurai
Tetsuo Narita
Keita Kataoka
Kazufumi Hirukawa
Kensuke Sumida
Shinji Yamada
Kacper Sierakowski
Masahiro Horita
Nobuyuki Ikarashi
Michal Bockowski
Jun Suda
Tetsu Kachi
Keywords:
Ion
p type doping
Inorganic chemistry
Materials science
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