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Material Properties of Spin‐on Silicon Oxide (SOX) for Fully Recessed NMOS Field Isolation
Material Properties of Spin‐on Silicon Oxide (SOX) for Fully Recessed NMOS Field Isolation
1990
G. Smolinsky
S. Vaidya
A. G. Timko
Nadia Lifshitz
A. Kornblit
J Lebowitz
Keywords:
NMOS logic
Material properties
Doping
Spin-½
Inorganic chemistry
Silicon oxide
Chemistry
Optoelectronics
Electrical engineering
Analytical chemistry
Engraving
Correction
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