Modeling of a Gc-sensing element for the interfacial toughness of metal thin films on substrates

Abstract A new type of the sensitive specimen named ‘ G c -sensing element’ that can be fabricated, using the plain and general micro-fabrication process, is proposed and modeled to measure the interfacial toughness G c of metal thin films on substrates. For the whole modeling process of the G c -sensing element, the finite element method and the concepts of the linear elastic fracture mechanics are applied. Moreover, the verification for energy-release rates calculated from the linear elastic fracture analysis is carried out, using the elastic–plastic fracture analysis. The results of this research show that the G c -sensing element provides a simple and convenient method for measuring the precise interfacial toughness of metal thin films on substrates.