Hybrid 3D printing by bridging micro/nano processes

A hybrid 3D printing process was developed for multiple-material/freeform nano-scale manufacturing. The process consisted of aerodynamically focused nanoparticle (AFN) printing, micro-machining, focused ion beam milling, and spin-coating. Theoretical and experimental investigations were carried out to improve the compatibility of each of the processes, enabling bridging of various different techniques. The resulting hybrid process could address the limitations of individual processes, enabling improved process scaling and dimensional degrees of freedom, without losing the advantages of the existing processes. The minimum structure width can be reduced to 50 nm using undercut structures. In addition, AFN printing employs particle impact for adhesion, and various inorganic materials are suitable for printing, including metals and functional ceramics. Using the developed system, we fabricated bi-material cantilevers for applications as a thermal actuator. The mechanical and thermal properties of the structure were investigated using an in situ measurement system, and irregular thermal phenomena due to the fabrication process were analyzed. We expect that this work will lead to improvements in the area of customized nano-scale manufacturing, as well as further improvements in manufacturing technology by combining different fabrication techniques.