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Characterization of Electrical Properties of α-Ga 2 O 3 Films Grown on m-plane Sapphire Substrates
Characterization of Electrical Properties of α-Ga 2 O 3 Films Grown on m-plane Sapphire Substrates
2017
Katsuya Ota
Takahito Sekiyama
Kazuaki Akaiwa
Tomoki Abe
Takashi Shinohe
Kunio Ichino
Keywords:
Combustion chemical vapor deposition
Gallium oxide
Analytical chemistry
Sapphire
Materials science
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