Fabrication of microtool for micromachining: A review

Abstract Nowadays, every component is getting miniature. For machining of these micro components, micromachining have to be performed either on soft or hard materials. To machine at micron range, the tool has to be also in the micron range. But the fabrication of the tool at the micron range is very challenging because of its size, shape, strength, etc. Several researchers have utilized non-conventional machining to fabricate microtools using different techniques such as Electrical discharge machining (EDM), Electrochemical machining (ECM), Focused ion beam machining (FIB), etc. In this paper, a detailed explanation of all these processes for the fabrication of micro tools has been discussed with the advantages and disadvantages associated with these processes. The shape and size of the fabricated microtool are also discussed with their applications.