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Charged species' densities and fluxes in a dual-frequency capacitive plasma
Charged species' densities and fluxes in a dual-frequency capacitive plasma
2005
Garrett Curley
Jean-Paul Booth
Cormac Corr
Jean Guillon
Sébastien Dine
Keywords:
Capacitive sensing
Plasma
Analytical chemistry
Chemistry
Flux (metallurgy)
charged species
dual frequency
Materials science
Atomic physics
Correction
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