Coating equipment and procedures

Coating installation (1) comprising at least one evacuatable vacuum chamber (10), which is provided for receiving a substrate (30), at least one gas supply means (20, 21, 22), by means of which at least one gaseous precursor into the container (10) can be introduced and at least one activation means (40) which contains at least one heatable activation element (41) whose end is fixed to an attachment point (42) on a holding element (43), characterized in that the activation element (41) (at a first heater 107 ) and at least one second heating device (50) is heatable, wherein (with the first heater 107) a (over the longitudinal extent of the activation element 41) uniform energy input is effected with the second heating device, a (over the longitudinal extent of the activation element 41) of varying energy input effected , wherein the temperature of the activation element in zuminde st a section under the action of the second heating above 1300 ° C can be brought.