Preparation and properties of a high temperature, flexible and colorless ITO coated polyimide substrate

Abstract A new high temperature, flexible and colorless indium-tin-oxide (ITO) coated plastic substrate has been prepared from a thermally stable, high glass transition temperature ( T g ) and colorless polyimide film. The polyimide was synthesized from 3,3′-diaminodiphenylsulfone (3,3′-DDS) and 4,4′-(hexafluoroisopropylidene) diphthalic anhydride (6FDA) monomers. Its heat distortion temperature was 278 °C. The ITO was deposited on the polyimide film using the magnetron-sputtering process. After annealing at 250 °C under nitrogen for 1 h, the resistivity of the ITO film was 4.0 × 10 −4  Ω cm, and its transmittance was 83.5%. Scanning electron microscope (SEM) and X-ray diffraction (XRD) were used to observe the surface and morphology of the ITO film. UV–visible spectroscopy and the four-probe method were used to study their optical and electrical properties. The high performance ITO-plastic substrate can be used in the next generation flat panel displays.