Reaction-inhibited interfacial coating between PEDOT:PSS sensing membrane and ITO electrode for highly-reliable piezoresistive pressure sensing applications

Abstract Background Poly(3,4-ethylenedioxythiophene):poly-(styrenesulfonate) (PEDOT:PSS) is a promising conductive polymer for the flexible piezoresistive pressure sensor. However, intrinsic hydrophilicity is detrimental to its structural stability under moisture. The present study aims to enhance piezoresistive pressure sensors' stability to achieve the highly-reliable electronic device applications. Method ITO/PEDOT:PSS/ITO piezoresistive pressure sensors with an interdigitated electrode (IDE) structure and different metallic interfacial layers were fabricated. Au layer was introduced between PEDOT:PSS sensing membrane and indium tin oxide (ITO) electrode as a reaction-inhibited interfacial coating of piezoresistive pressure sensors. Significant findings After a measurement time interval of 6 months, the interface reaction suppressed significantly, resulting in low sensitivity deviation (9.22%) and improved durability (400 cycles). The devices are completely sealed using polyethylene terephthalate packaging, avoiding humidity absorption in PEDOT:PSS films successfully. The packaged ITO/PEDOT:PSS/ITO piezoresistive pressure sensors with a double-sided 10-nm-thick Au interfacial layer is a promising candidate for use in highly reliable pressure sensing applications.