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Study on the crystal growth conditions of non-polar AlN on Si for GaN template substrate
Study on the crystal growth conditions of non-polar AlN on Si for GaN template substrate
2021
Masaya Morita
Keiji Ishibashi
Kenichiro Takahashi
Toyohiro Chikyow
Atsushi Ogura
Takahiro Nagata
Keywords:
non polar
Chemical engineering
Substrate (chemistry)
Materials science
Crystal growth
Sputtering
Correction
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